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Varifocal MEMS mirrors for high-speed axial focus scanning: a review
Recent advances brought the performance of MEMS-based varifocal mirrors to levels comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are becoming capable of high axial resolution exceeding 300 resolvable planes, can achieve microsecond response times, continuous operatio...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group UK
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10603115/ https://www.ncbi.nlm.nih.gov/pubmed/37900975 http://dx.doi.org/10.1038/s41378-022-00481-0 |