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Vacuum Tunneling Transistor with Nano Vacuum Chamber for Harsh Environments
[Image: see text] A nano vacuum tube which consists of a vacuum transistor and a nano vacuum chamber was demonstrated. For the device, a vacuum region is an electron transport channel, and a vacuum is a tunneling barrier. Tilted angle evaporation was studied for the formation of the nano level vacuu...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Chemical Society
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10604106/ https://www.ncbi.nlm.nih.gov/pubmed/37803487 http://dx.doi.org/10.1021/acsnano.3c02916 |