Ellipsometric Study on the Uniformity of Al:ZnO Thin Films Deposited Using DC Sputtering at Room Temperature over Large Areas

Al-doped ZnO combines high transparency and conductivity with abundant and non-toxic elements; making it suitable for optoelectronic devices with large-scale applications. In order to check the quality of the material deposited over large areas, spectroscopic ellipsometry is a powerful technique tha...

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Detalles Bibliográficos
Autores principales: Guillén, Cecilia, Trigo, Juan Francisco
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10608559/
https://www.ncbi.nlm.nih.gov/pubmed/37895627
http://dx.doi.org/10.3390/ma16206644

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10608559/
https://www.ncbi.nlm.nih.gov/pubmed/37895627
http://dx.doi.org/10.3390/ma16206644

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