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Ellipsometric Study on the Uniformity of Al:ZnO Thin Films Deposited Using DC Sputtering at Room Temperature over Large Areas
Al-doped ZnO combines high transparency and conductivity with abundant and non-toxic elements; making it suitable for optoelectronic devices with large-scale applications. In order to check the quality of the material deposited over large areas, spectroscopic ellipsometry is a powerful technique tha...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10608559/ https://www.ncbi.nlm.nih.gov/pubmed/37895627 http://dx.doi.org/10.3390/ma16206644 |