Effect of the Degree of Li(3)PO(4) Vapor Dissociation on the Ionic Conductivity of LiPON Thin Films

Thin films of solid-state lithium-ion electrolytes show promise for use in small-sized autonomous power sources for micro- and nanoelectronic elements. The high rate of vacuum-plasma synthesis (~0.5 μm/h) of lithium phosphor-oxynitride (LiPON) films with an ionic conductivity of ~2·10(−6) S/cm is ac...

Descripción completa

Detalles Bibliográficos
Autores principales: Kamenetskikh, Alexander, Gavrilov, Nikolay, Ershov, Alexey, Tretnikov, Petr
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10608690/
https://www.ncbi.nlm.nih.gov/pubmed/37888019
http://dx.doi.org/10.3390/membranes13100847

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10608690/
https://www.ncbi.nlm.nih.gov/pubmed/37888019
http://dx.doi.org/10.3390/membranes13100847

Ejemplares similares