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Effect of the Degree of Li(3)PO(4) Vapor Dissociation on the Ionic Conductivity of LiPON Thin Films
Thin films of solid-state lithium-ion electrolytes show promise for use in small-sized autonomous power sources for micro- and nanoelectronic elements. The high rate of vacuum-plasma synthesis (~0.5 μm/h) of lithium phosphor-oxynitride (LiPON) films with an ionic conductivity of ~2·10(−6) S/cm is ac...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10608690/ https://www.ncbi.nlm.nih.gov/pubmed/37888019 http://dx.doi.org/10.3390/membranes13100847 |