Nonconventional Tether Structure for Quality Factor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator

This article presents a new design of supporting tethers through the concept of force distribution. The transmitted force applied on tethers will be distributed on the new tether design area, resulting in low acoustic energy transferred to anchor boundaries and stored energy enhancement. This techni...

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Detalles Bibliográficos
Autores principales: Awad, Mohammed, Workie, Temesgen Bailie, Bao, Jingfu, Hashimoto, Ken-ya
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10608936/
https://www.ncbi.nlm.nih.gov/pubmed/37893402
http://dx.doi.org/10.3390/mi14101965

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10608936/
https://www.ncbi.nlm.nih.gov/pubmed/37893402
http://dx.doi.org/10.3390/mi14101965

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