Measurement and Characterization of Rotational Errors of Aerostatic Bearings in Subnanometer Accuracy

Measuring the running accuracy of aerostatic bearings is challenging because of the high-precision requirements in rotational motion. This paper presents an ultra-high precision measurement method for aerostatic bearings using atomic force microscopy (AFM) as the displacement sensor. The Donaldson r...

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Detalles Bibliográficos
Autores principales: Wang, Ping, Kong, Lingbao, An, Huijun, Gao, Minge, Cui, Hailong, Lei, Dajiang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10608937/
https://www.ncbi.nlm.nih.gov/pubmed/37893388
http://dx.doi.org/10.3390/mi14101952

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10608937/
https://www.ncbi.nlm.nih.gov/pubmed/37893388
http://dx.doi.org/10.3390/mi14101952

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