The High-Efficiency Design Method for Capacitive MEMS Accelerometer

In this research, a high-efficiency design method of the capacitive MEMS accelerometer is proposed. As the MEMS accelerometer has high precision and a compact structure, much research has been carried out, which mainly focused on the structural design and materials selection. To overcome the inconve...

Descripción completa

Detalles Bibliográficos
Autores principales: Liu, Wen, Zhao, Tianlong, He, Zhiyuan, Ye, Jingze, Gong, Shaotong, Wang, Xianglong, Yang, Yintang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10609016/
https://www.ncbi.nlm.nih.gov/pubmed/37893328
http://dx.doi.org/10.3390/mi14101891

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10609016/
https://www.ncbi.nlm.nih.gov/pubmed/37893328
http://dx.doi.org/10.3390/mi14101891

Ejemplares similares