Designed Structures of Interdigital Electrodes for Thin Film SAW Devices

This paper studied the impact of the microstructure of interdigital electrodes on the performance of surface acoustic wave (SAW) resonators and proposed an innovative piston, dummy finger and tilt (PDT) structure, which was then applied to the GLONASS L3 band filters. Through the adoption of 3D fini...

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Detalles Bibliográficos
Autores principales: Qian, Yicong, Shuai, Yao, Wu, Chuangui, Luo, Wenbo, Pan, Xinqiang, Zhang, Wanli
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10609187/
https://www.ncbi.nlm.nih.gov/pubmed/37893366
http://dx.doi.org/10.3390/mi14101929

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10609187/
https://www.ncbi.nlm.nih.gov/pubmed/37893366
http://dx.doi.org/10.3390/mi14101929

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