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Advanced Etching Techniques of LiNbO(3) Nanodevices

Single LiNbO(3) (LNO) crystals are widely utilized in surface acoustic wave devices, optoelectronic devices, and novel ferroelectric memory devices due to their remarkable electro-optic and piezoelectric properties, and high saturation and remnant polarizations. However, challenges remain regarding...

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Detalles Bibliográficos
Autores principales: Shen, Bowen, Hu, Di, Dai, Cuihua, Yu, Xiaoyang, Tan, Xiaojun, Sun, Jie, Jiang, Jun, Jiang, Anquan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10609314/
https://www.ncbi.nlm.nih.gov/pubmed/37887940
http://dx.doi.org/10.3390/nano13202789