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Advanced Etching Techniques of LiNbO(3) Nanodevices
Single LiNbO(3) (LNO) crystals are widely utilized in surface acoustic wave devices, optoelectronic devices, and novel ferroelectric memory devices due to their remarkable electro-optic and piezoelectric properties, and high saturation and remnant polarizations. However, challenges remain regarding...
Autores principales: | Shen, Bowen, Hu, Di, Dai, Cuihua, Yu, Xiaoyang, Tan, Xiaojun, Sun, Jie, Jiang, Jun, Jiang, Anquan |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10609314/ https://www.ncbi.nlm.nih.gov/pubmed/37887940 http://dx.doi.org/10.3390/nano13202789 |
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