Effect of Microwave Annealing on the Sensing Characteristics of HfO(2) Thin Film for High Sensitive pH-EGFET Sensor

Recently, certain challenges have persisted in PH sensor applications, especially when employing hafnium oxide (HfO(2)) thin films as sensing layers, where issues related to sensitivity, hysteresis, and long-term stability hamper performance. Microwave annealing (MWA) technology, as a promising solu...

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Detalles Bibliográficos
Autores principales: Cui, Siwei, Yang, Hui, Zhang, Yifei, Su, Xing, Wu, Dongping
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10609386/
https://www.ncbi.nlm.nih.gov/pubmed/37893291
http://dx.doi.org/10.3390/mi14101854

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10609386/
https://www.ncbi.nlm.nih.gov/pubmed/37893291
http://dx.doi.org/10.3390/mi14101854

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