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Effect of Microwave Annealing on the Sensing Characteristics of HfO(2) Thin Film for High Sensitive pH-EGFET Sensor

Recently, certain challenges have persisted in PH sensor applications, especially when employing hafnium oxide (HfO(2)) thin films as sensing layers, where issues related to sensitivity, hysteresis, and long-term stability hamper performance. Microwave annealing (MWA) technology, as a promising solu...

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Detalles Bibliográficos
Autores principales:	Cui, Siwei, Yang, Hui, Zhang, Yifei, Su, Xing, Wu, Dongping
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10609386/ https://www.ncbi.nlm.nih.gov/pubmed/37893291 http://dx.doi.org/10.3390/mi14101854

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