Fabrication of a Highly NO(2)-Sensitive Gas Sensor Based on a Defective ZnO Nanofilm and Using Electron Beam Lithography

Hazardous substances produced by anthropic activities threaten human health and the green environment. Gas sensors, especially those based on metal oxides, are widely used to monitor toxic gases with low cost and efficient performance. In this study, electron beam lithography with two-step exposure...

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Detalles Bibliográficos
Autores principales: Feng, Zhifu, Giubertoni, Damiano, Cian, Alessandro, Valt, Matteo, Ardit, Matteo, Pedrielli, Andrea, Vanzetti, Lia, Fabbri, Barbara, Guidi, Vincenzo, Gaiardo, Andrea
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10609393/
https://www.ncbi.nlm.nih.gov/pubmed/37893345
http://dx.doi.org/10.3390/mi14101908

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10609393/
https://www.ncbi.nlm.nih.gov/pubmed/37893345
http://dx.doi.org/10.3390/mi14101908

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