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Fabrication of a Highly NO(2)-Sensitive Gas Sensor Based on a Defective ZnO Nanofilm and Using Electron Beam Lithography
Hazardous substances produced by anthropic activities threaten human health and the green environment. Gas sensors, especially those based on metal oxides, are widely used to monitor toxic gases with low cost and efficient performance. In this study, electron beam lithography with two-step exposure...
Autores principales: | Feng, Zhifu, Giubertoni, Damiano, Cian, Alessandro, Valt, Matteo, Ardit, Matteo, Pedrielli, Andrea, Vanzetti, Lia, Fabbri, Barbara, Guidi, Vincenzo, Gaiardo, Andrea |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10609393/ https://www.ncbi.nlm.nih.gov/pubmed/37893345 http://dx.doi.org/10.3390/mi14101908 |
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