Research on the Mass Adding and Removing Combined Mechanical Trimming Method of the Ring MEMS Gyroscope

The MEMS gyroscope is one of the basic units of inertial navigation, whose performance and accuracy is noteworthy. Because of the limitations of processing technology and other factors, the relative manufacturing error of MEMS gyroscopes is usually large. Errors directly lead to a frequency mismatch...

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Detalles Bibliográficos
Autores principales: Wang, Xinyu, Wu, Kai, Wang, Chengxiang, Li, Qingsong, Hou, Zhanqiang, Xiao, Dingbang, Wu, Xuezhong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10609602/
https://www.ncbi.nlm.nih.gov/pubmed/37893394
http://dx.doi.org/10.3390/mi14101957

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10609602/
https://www.ncbi.nlm.nih.gov/pubmed/37893394
http://dx.doi.org/10.3390/mi14101957

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