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Soft-Sensing Regression Model: From Sensor to Wafer Metrology Forecasting
The semiconductor industry is one of the most technology-evolving and capital-intensive market sectors. Effective inspection and metrology are necessary to improve product yield, increase product quality and reduce costs. In recent years, many types of semiconductor manufacturing equipments have bee...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10611205/ https://www.ncbi.nlm.nih.gov/pubmed/37896457 http://dx.doi.org/10.3390/s23208363 |