Research on Motion Control and Wafer-Centering Algorithm of Wafer-Handling Robot in Semiconductor Manufacturing

This paper studies the AWC (Active Wafer Centering) algorithm for the movement control and wafer calibration of the handling robot in semiconductor manufacturing to prevent wafer surface contact and contamination during the transfer process. The mechanical and software architecture of the wafer-hand...

Descripción completa

Detalles Bibliográficos
Autores principales: Han, Bing-Yuan, Zhao, Bin, Sun, Ruo-Huai
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10611260/
https://www.ncbi.nlm.nih.gov/pubmed/37896595
http://dx.doi.org/10.3390/s23208502

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10611260/
https://www.ncbi.nlm.nih.gov/pubmed/37896595
http://dx.doi.org/10.3390/s23208502

Ejemplares similares