Half-Bridge Silicon Strain Gauges with Arc-Shaped Piezoresistors

Half-bridge silicon strain gauges are widely used in the fabrication of diaphragm-type high-pressure sensors, but in some applications, they suffer from low output sensitivity because of mounting position constraints. Through a special design and fabrication approach, a new half-bridge silicon strai...

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Detalles Bibliográficos
Autores principales: Han, Ji-Hoon, Min, Sung Joon, Lee, Eun-Sang, Kim, Joon Hyub, Min, Nam Ki
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10611398/
https://www.ncbi.nlm.nih.gov/pubmed/37896484
http://dx.doi.org/10.3390/s23208390

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10611398/
https://www.ncbi.nlm.nih.gov/pubmed/37896484
http://dx.doi.org/10.3390/s23208390

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