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Half-Bridge Silicon Strain Gauges with Arc-Shaped Piezoresistors
Half-bridge silicon strain gauges are widely used in the fabrication of diaphragm-type high-pressure sensors, but in some applications, they suffer from low output sensitivity because of mounting position constraints. Through a special design and fabrication approach, a new half-bridge silicon strai...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10611398/ https://www.ncbi.nlm.nih.gov/pubmed/37896484 http://dx.doi.org/10.3390/s23208390 |