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Electrochemical etching strategy for shaping monolithic 3D structures from 4H-SiC wafers
Silicon Carbide (SiC) is an outstanding material, not only for electronic applications, but also for projected functionalities in the realm of spin-based quantum technologies, nano-mechanical resonators and photonics-on-a-chip. For shaping 3D structures out of SiC wafers, predominantly dry-etching t...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10625639/ https://www.ncbi.nlm.nih.gov/pubmed/37925526 http://dx.doi.org/10.1038/s41598-023-46110-2 |