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Post-CMOS processing challenges and design developments of CMOS-MEMS microheaters for local CNT synthesis
Carbon nanotubes (CNTs) can be locally grown on custom-designed CMOS microheaters by a thermal chemical vapour deposition (CVD) process to utilize the sensing capabilities of CNTs in emerging micro- and nanotechnology applications. For such a direct CMOS-CNT integration, a key requirement is the dev...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group UK
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10625928/ https://www.ncbi.nlm.nih.gov/pubmed/37937184 http://dx.doi.org/10.1038/s41378-023-00598-w |