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The Role of Carbon in Metal–Organic Chemical Vapor Deposition-Grown MoS(2) Films
Acquiring homogeneous and reproducible wafer-scale transition metal dichalcogenide (TMDC) films is crucial for modern electronics. Metal–organic chemical vapor deposition (MOCVD) offers a promising approach for scalable production and large-area integration. However, during MOCVD synthesis, extraneo...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10647219/ https://www.ncbi.nlm.nih.gov/pubmed/37959627 http://dx.doi.org/10.3390/ma16217030 |