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The Role of Carbon in Metal–Organic Chemical Vapor Deposition-Grown MoS(2) Films

Acquiring homogeneous and reproducible wafer-scale transition metal dichalcogenide (TMDC) films is crucial for modern electronics. Metal–organic chemical vapor deposition (MOCVD) offers a promising approach for scalable production and large-area integration. However, during MOCVD synthesis, extraneo...

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Detalles Bibliográficos
Autores principales: Hou, Tianyu, Li, Di, Qu, Yan, Hao, Yufeng, Lai, Yun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10647219/
https://www.ncbi.nlm.nih.gov/pubmed/37959627
http://dx.doi.org/10.3390/ma16217030