Design, Optimization and Performance Assessment of Single Port Film Bulk Acoustic Resonator through Finite Element Simulation

In this paper, the study is supported by design, FEA simulation, and practical RF measurements on fabricated single-port-cavity-based acoustic resonator for gas sensing applications. In the FEA simulation, frequency domain analysis was performed to enhance the performance of the acoustic resonator....

Descripción completa

Detalles Bibliográficos
Autores principales: Patel, Raju, Adhikari, Manoj Singh, Tripathi, Shailendra Kumar, Sahu, Sourabh
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10648268/
https://www.ncbi.nlm.nih.gov/pubmed/37960619
http://dx.doi.org/10.3390/s23218920

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10648268/
https://www.ncbi.nlm.nih.gov/pubmed/37960619
http://dx.doi.org/10.3390/s23218920

Ejemplares similares