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Wake-Up Free Ultrathin Ferroelectric Hf(0.5)Zr(0.5)O(2) Films
The development of the new generation of non-volatile high-density ferroelectric memory requires the utilization of ultrathin ferroelectric films. The most promising candidates are polycrystalline-doped HfO(2) films because of their perfect compatibility with silicon technology and excellent ferroel...
Autores principales: | Chouprik, Anastasia, Mikheev, Vitalii, Korostylev, Evgeny, Kozodaev, Maxim, Zarubin, Sergey, Vinnik, Denis, Gudkova, Svetlana, Negrov, Dmitrii |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10648811/ https://www.ncbi.nlm.nih.gov/pubmed/37947671 http://dx.doi.org/10.3390/nano13212825 |
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