Metal Microelectromechanical Resonator Exhibiting Fast Human Activity Detection

This work presents a MEMS resonator used as an ultra-high resolution water vapor sensor (humidity sensing) to detect human activity through finger movement as a demonstrator example. This microelectromechanical resonator is designed as a clamped-clamped beam fabricated using the top metal layer of a...

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Detalles Bibliográficos
Autores principales: Torres, Francesc, Uranga, Arantxa, Barniol, Núria
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10648888/
https://www.ncbi.nlm.nih.gov/pubmed/37960643
http://dx.doi.org/10.3390/s23218945

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10648888/
https://www.ncbi.nlm.nih.gov/pubmed/37960643
http://dx.doi.org/10.3390/s23218945

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