Cargando…
Metal Microelectromechanical Resonator Exhibiting Fast Human Activity Detection
This work presents a MEMS resonator used as an ultra-high resolution water vapor sensor (humidity sensing) to detect human activity through finger movement as a demonstrator example. This microelectromechanical resonator is designed as a clamped-clamped beam fabricated using the top metal layer of a...
Autores principales: | Torres, Francesc, Uranga, Arantxa, Barniol, Núria |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10648888/ https://www.ncbi.nlm.nih.gov/pubmed/37960643 http://dx.doi.org/10.3390/s23218945 |
Ejemplares similares
-
High Performance Seesaw Torsional CMOS-MEMS Relay Using Tungsten VIA Layer
por: Riverola, Martín, et al.
Publicado: (2018) -
Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors
por: Torres, Francesc, et al.
Publicado: (2016) -
Enhancing AlN PMUTs’ Acoustic Responsivity within a MEMS-on-CMOS Process
por: Ledesma, Eyglis, et al.
Publicado: (2021) -
Top-Down CMOS-NEMS Polysilicon Nanowire with Piezoresistive Transduction
por: Marigó, Eloi, et al.
Publicado: (2015) -
CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology
por: Muñoz-Gamarra, Jose Luis, et al.
Publicado: (2016)