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A Reliability Analysis of a MEMS Flow Sensor with an Accelerated Degradation Test
With the wide application of flow sensors, their reliability under extreme conditions has become a concern in recent years. The reliability of a Micro Electro Mechanical Systems (MEMS) flow sensor under temperature [Formula: see text] is researched in this paper. This flow sensor consists of two par...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10650100/ https://www.ncbi.nlm.nih.gov/pubmed/37960433 http://dx.doi.org/10.3390/s23218733 |