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Single-lens dynamic [Formula: see text] -scanning for simultaneous in situ position detection and laser processing focus control
Existing auto-focusing methods in laser processing typically include two independent modules, one for surface detection and another for [Formula: see text] -axis adjustment. The latter is mostly implemented by mechanical [Formula: see text] stage motion, which is up to three orders of magnitude slow...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10656504/ https://www.ncbi.nlm.nih.gov/pubmed/37978285 http://dx.doi.org/10.1038/s41377-023-01303-2 |