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Single-lens dynamic [Formula: see text] -scanning for simultaneous in situ position detection and laser processing focus control

Existing auto-focusing methods in laser processing typically include two independent modules, one for surface detection and another for [Formula: see text] -axis adjustment. The latter is mostly implemented by mechanical [Formula: see text] stage motion, which is up to three orders of magnitude slow...

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Detalles Bibliográficos
Autores principales: Du, Xiaohan, Florian, Camilo, Arnold, Craig B.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10656504/
https://www.ncbi.nlm.nih.gov/pubmed/37978285
http://dx.doi.org/10.1038/s41377-023-01303-2