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A highly sensitive flexible capacitive pressure sensor with hierarchical pyramid micro-structured PDMS-based dielectric layer for health monitoring
Herein, a flexible pressure sensor with high sensitivity was created using a dielectric layer featuring a hierarchical pyramid microstructure, both in simulation and fabrication. The capacitive pressure sensor comprises a hierarchically arranged dielectric layer made of polydimethylsiloxane (PDMS) w...
Autores principales: | , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Frontiers Media S.A.
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10665575/ https://www.ncbi.nlm.nih.gov/pubmed/38026884 http://dx.doi.org/10.3389/fbioe.2023.1303142 |