New Heteroleptic Germanium Precursors for GeO(2) Thin Films by Atomic Layer Deposition

[Image: see text] This study describes the synthesis of 12 new germanium complexes containing β-diketonate and/or N-alkoxy carboxamidate-type ligands as precursors for GeO(2) through atomic layer deposition (ALD). A series of Ge(β-diketonate)Cl complexes such as Ge(acac)Cl (1) and Ge(tmhd)Cl (2) wer...

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Detalles Bibliográficos
Autores principales: Choi, Heenang, Park, Chanwoo, Lee, Sung Kwang, Ryu, Ji Yeon, Son, Seung Uk, Eom, Taeyong, Chung, Taek-Mo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2023
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10666237/
https://www.ncbi.nlm.nih.gov/pubmed/38027341
http://dx.doi.org/10.1021/acsomega.3c05657

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10666237/
https://www.ncbi.nlm.nih.gov/pubmed/38027341
http://dx.doi.org/10.1021/acsomega.3c05657

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