Patterning Techniques in Coplanar Micro/Nano Capacitive Sensors

Rapid technological advancements have led to increased demands for sensors. Hence, high performance suitable for next-generation technology is required. As sensing technology has numerous applications, various materials and patterning methods are used for sensor fabrication. This affects the charact...

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Detalles Bibliográficos
Autores principales: Joo, Seokwon, Han, Jung Yeon, Seo, Soonmin, Kim, Ju-Hyung
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10672816/
https://www.ncbi.nlm.nih.gov/pubmed/38004891
http://dx.doi.org/10.3390/mi14112034

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10672816/
https://www.ncbi.nlm.nih.gov/pubmed/38004891
http://dx.doi.org/10.3390/mi14112034

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