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Patterning Techniques in Coplanar Micro/Nano Capacitive Sensors
Rapid technological advancements have led to increased demands for sensors. Hence, high performance suitable for next-generation technology is required. As sensing technology has numerous applications, various materials and patterning methods are used for sensor fabrication. This affects the charact...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10672816/ https://www.ncbi.nlm.nih.gov/pubmed/38004891 http://dx.doi.org/10.3390/mi14112034 |