Study of the Chemical Vapor Deposition of Nano-Sized Carbon Phases on {001} Silicon

Different nano-sized phases were synthesized using chemical vapor deposition (CVD) processes. The deposition took place on {001} Si substrates at about 1150–1160 °C. The carbon source was thermally decomposed acetone (CH(3))(2)CO in a main gas flow of argon. We performed experiments at two ((CH(3))(...

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Detalles Bibliográficos
Autores principales: Milenov, Teodor, Trifonov, Dimitar, Kalchevski, Dobromir A., Kolev, Stefan, Avramova, Ivalina, Russev, Stoyan, Genkov, Kaloyan, Avdeev, Georgi, Dimov, Dimitar, Karaivanova, Desislava M., Valcheva, Evgenia
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10672876/
https://www.ncbi.nlm.nih.gov/pubmed/38005118
http://dx.doi.org/10.3390/ma16227190

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10672876/
https://www.ncbi.nlm.nih.gov/pubmed/38005118
http://dx.doi.org/10.3390/ma16227190

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