An Exploratory Study of Laser Scribing Quality through Cross-Section Scribing Profiles

This article presents a novel approach for evaluating laser scribing quality through cross-section profiles generated from a three-dimensional optical profiler. Existing methods for assessing scribing quality only consider the width and depth of a scribe profile. The proposed method uses a cubic spl...

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Detalles Bibliográficos
Autores principales: Chen, Ruqi, Chang, Shing, Lei, Shuting
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10672879/
https://www.ncbi.nlm.nih.gov/pubmed/38004878
http://dx.doi.org/10.3390/mi14112020

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10672879/
https://www.ncbi.nlm.nih.gov/pubmed/38004878
http://dx.doi.org/10.3390/mi14112020

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