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An Exploratory Study of Laser Scribing Quality through Cross-Section Scribing Profiles

This article presents a novel approach for evaluating laser scribing quality through cross-section profiles generated from a three-dimensional optical profiler. Existing methods for assessing scribing quality only consider the width and depth of a scribe profile. The proposed method uses a cubic spl...

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Autores principales: Chen, Ruqi, Chang, Shing, Lei, Shuting
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10672879/
https://www.ncbi.nlm.nih.gov/pubmed/38004878
http://dx.doi.org/10.3390/mi14112020
_version_ 1785140494349631488
author Chen, Ruqi
Chang, Shing
Lei, Shuting
author_facet Chen, Ruqi
Chang, Shing
Lei, Shuting
author_sort Chen, Ruqi
collection PubMed
description This article presents a novel approach for evaluating laser scribing quality through cross-section profiles generated from a three-dimensional optical profiler. Existing methods for assessing scribing quality only consider the width and depth of a scribe profile. The proposed method uses a cubic spline model for cross-section profiles. Two quality characteristics are proposed to assess scribing accuracy and consistency. Accuracy is measured by the ratio of the actual laser-scribed area to the target area (RA), which reflects the deviation from the desired profile. The mean square error (MSE) is a measure of how close each scribed cross-section under the same scribing conditions is to the fitted cubic spline model. Over 1370 cross-section profiles were generated under 171 scribing conditions. Two response surface polynomial models for RA and MSE were built with 18 scribing conditions with acceptable scribing depth and RA values. Both RA and MSE were considered simultaneously via contour plots. A scatter plot of RA and MSE was then used for Pareto optimization. It was found that the cross-sectional profile of a laser scribe could be accurately represented by a cubic spline model. A multivariate nonlinear regression model for RA and MSE identified pulse energy and repetition rate as the two dominant laser parameters. A Pareto optimization analysis further established a Pareto front, where the best compromised solution could be found.
format Online
Article
Text
id pubmed-10672879
institution National Center for Biotechnology Information
language English
publishDate 2023
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-106728792023-10-30 An Exploratory Study of Laser Scribing Quality through Cross-Section Scribing Profiles Chen, Ruqi Chang, Shing Lei, Shuting Micromachines (Basel) Article This article presents a novel approach for evaluating laser scribing quality through cross-section profiles generated from a three-dimensional optical profiler. Existing methods for assessing scribing quality only consider the width and depth of a scribe profile. The proposed method uses a cubic spline model for cross-section profiles. Two quality characteristics are proposed to assess scribing accuracy and consistency. Accuracy is measured by the ratio of the actual laser-scribed area to the target area (RA), which reflects the deviation from the desired profile. The mean square error (MSE) is a measure of how close each scribed cross-section under the same scribing conditions is to the fitted cubic spline model. Over 1370 cross-section profiles were generated under 171 scribing conditions. Two response surface polynomial models for RA and MSE were built with 18 scribing conditions with acceptable scribing depth and RA values. Both RA and MSE were considered simultaneously via contour plots. A scatter plot of RA and MSE was then used for Pareto optimization. It was found that the cross-sectional profile of a laser scribe could be accurately represented by a cubic spline model. A multivariate nonlinear regression model for RA and MSE identified pulse energy and repetition rate as the two dominant laser parameters. A Pareto optimization analysis further established a Pareto front, where the best compromised solution could be found. MDPI 2023-10-30 /pmc/articles/PMC10672879/ /pubmed/38004878 http://dx.doi.org/10.3390/mi14112020 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Chen, Ruqi
Chang, Shing
Lei, Shuting
An Exploratory Study of Laser Scribing Quality through Cross-Section Scribing Profiles
title An Exploratory Study of Laser Scribing Quality through Cross-Section Scribing Profiles
title_full An Exploratory Study of Laser Scribing Quality through Cross-Section Scribing Profiles
title_fullStr An Exploratory Study of Laser Scribing Quality through Cross-Section Scribing Profiles
title_full_unstemmed An Exploratory Study of Laser Scribing Quality through Cross-Section Scribing Profiles
title_short An Exploratory Study of Laser Scribing Quality through Cross-Section Scribing Profiles
title_sort exploratory study of laser scribing quality through cross-section scribing profiles
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10672879/
https://www.ncbi.nlm.nih.gov/pubmed/38004878
http://dx.doi.org/10.3390/mi14112020
work_keys_str_mv AT chenruqi anexploratorystudyoflaserscribingqualitythroughcrosssectionscribingprofiles
AT changshing anexploratorystudyoflaserscribingqualitythroughcrosssectionscribingprofiles
AT leishuting anexploratorystudyoflaserscribingqualitythroughcrosssectionscribingprofiles
AT chenruqi exploratorystudyoflaserscribingqualitythroughcrosssectionscribingprofiles
AT changshing exploratorystudyoflaserscribingqualitythroughcrosssectionscribingprofiles
AT leishuting exploratorystudyoflaserscribingqualitythroughcrosssectionscribingprofiles