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An Exploratory Study of Laser Scribing Quality through Cross-Section Scribing Profiles
This article presents a novel approach for evaluating laser scribing quality through cross-section profiles generated from a three-dimensional optical profiler. Existing methods for assessing scribing quality only consider the width and depth of a scribe profile. The proposed method uses a cubic spl...
Autores principales: | Chen, Ruqi, Chang, Shing, Lei, Shuting |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10672879/ https://www.ncbi.nlm.nih.gov/pubmed/38004878 http://dx.doi.org/10.3390/mi14112020 |
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