Towards High-Temperature MEMS: Two-Step Annealing Suppressed Recrystallization in Thin Multilayer Pt-Rh/Zr Films

Platinum-based thin films are widely used to create microelectronic devices operating at temperatures above 500 °C. One of the most effective ways to increase the high-temperature stability of platinum-based films involves incorporating refractory metal oxides (e.g., ZrO(2), HfO(2)). In such structu...

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Detalles Bibliográficos
Autores principales: Pleshakov, Georgii A., Kalinin, Ivan A., Ivanov, Alexey V., Roslyakov, Ilya V., Yaminsky, Igor V., Napolskii, Kirill S.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673003/
https://www.ncbi.nlm.nih.gov/pubmed/38004860
http://dx.doi.org/10.3390/mi14112003

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673003/
https://www.ncbi.nlm.nih.gov/pubmed/38004860
http://dx.doi.org/10.3390/mi14112003

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