Forty-Nanometer Plasmonic Lithography Resolution with Two-Stage Bowtie Lens

Optical imaging and photolithography hold the promise of extensive applications in the branch of nano-electronics, metrology, and the intricate domain of single-molecule biology. Nonetheless, the phenomenon of light diffraction imposes a foundational constraint upon optical resolution, thus presenti...

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Detalles Bibliográficos
Autores principales: Meng, Yan, Peng, Ruiguang, Cheng, Jie, Meng, Yonggang, Zhao, Qian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673134/
https://www.ncbi.nlm.nih.gov/pubmed/38004894
http://dx.doi.org/10.3390/mi14112037

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673134/
https://www.ncbi.nlm.nih.gov/pubmed/38004894
http://dx.doi.org/10.3390/mi14112037

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