High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure

In this work, a longitudinally excited shear-wave resonator (YBAR) based on single-crystalline lithium tantalate (LiTaO(3), LT) thin film is proposed. The YBAR has a 200 nm X-cut thin film and molybdenum electrode. A high effective electromechanical coupling coefficient (k(2)(eff)) of up to 19% for...

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Detalles Bibliográficos
Autores principales: Zhang, Zhiheng, Xuan, Weipeng, Jiang, Hong, Xie, Weilun, Li, Zhaoling, Dong, Shurong, Jin, Hao, Luo, Jikui
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673135/
https://www.ncbi.nlm.nih.gov/pubmed/38004943
http://dx.doi.org/10.3390/mi14112086

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673135/
https://www.ncbi.nlm.nih.gov/pubmed/38004943
http://dx.doi.org/10.3390/mi14112086

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