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High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure
In this work, a longitudinally excited shear-wave resonator (YBAR) based on single-crystalline lithium tantalate (LiTaO(3), LT) thin film is proposed. The YBAR has a 200 nm X-cut thin film and molybdenum electrode. A high effective electromechanical coupling coefficient (k(2)(eff)) of up to 19% for...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673135/ https://www.ncbi.nlm.nih.gov/pubmed/38004943 http://dx.doi.org/10.3390/mi14112086 |
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author | Zhang, Zhiheng Xuan, Weipeng Jiang, Hong Xie, Weilun Li, Zhaoling Dong, Shurong Jin, Hao Luo, Jikui |
author_facet | Zhang, Zhiheng Xuan, Weipeng Jiang, Hong Xie, Weilun Li, Zhaoling Dong, Shurong Jin, Hao Luo, Jikui |
author_sort | Zhang, Zhiheng |
collection | PubMed |
description | In this work, a longitudinally excited shear-wave resonator (YBAR) based on single-crystalline lithium tantalate (LiTaO(3), LT) thin film is proposed. The YBAR has a 200 nm X-cut thin film and molybdenum electrode. A high effective electromechanical coupling coefficient (k(2)(eff)) of up to 19% for the suspension-type structure was obtained. Furthermore, a Bragg reflector (SiO(2)/Pt) with optimized layer thickness ratio was employed to improve the performance of the YBAR. Compared to the acoustic wave resonators with the conventional quarter-wave ([Formula: see text] Bragg reflector, the proposed YBAR with an optimized Bragg reflector can reflect both the longitudinal and shear waves efficiently, and resonators with spurious-free response and high quality (Q) value were achieved. This work provides a potential solution to enabling high coupling micro-acoustic resonators with high Q factor in the 5G/6G communication system. |
format | Online Article Text |
id | pubmed-10673135 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2023 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-106731352023-11-11 High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure Zhang, Zhiheng Xuan, Weipeng Jiang, Hong Xie, Weilun Li, Zhaoling Dong, Shurong Jin, Hao Luo, Jikui Micromachines (Basel) Article In this work, a longitudinally excited shear-wave resonator (YBAR) based on single-crystalline lithium tantalate (LiTaO(3), LT) thin film is proposed. The YBAR has a 200 nm X-cut thin film and molybdenum electrode. A high effective electromechanical coupling coefficient (k(2)(eff)) of up to 19% for the suspension-type structure was obtained. Furthermore, a Bragg reflector (SiO(2)/Pt) with optimized layer thickness ratio was employed to improve the performance of the YBAR. Compared to the acoustic wave resonators with the conventional quarter-wave ([Formula: see text] Bragg reflector, the proposed YBAR with an optimized Bragg reflector can reflect both the longitudinal and shear waves efficiently, and resonators with spurious-free response and high quality (Q) value were achieved. This work provides a potential solution to enabling high coupling micro-acoustic resonators with high Q factor in the 5G/6G communication system. MDPI 2023-11-11 /pmc/articles/PMC10673135/ /pubmed/38004943 http://dx.doi.org/10.3390/mi14112086 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Zhang, Zhiheng Xuan, Weipeng Jiang, Hong Xie, Weilun Li, Zhaoling Dong, Shurong Jin, Hao Luo, Jikui High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure |
title | High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure |
title_full | High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure |
title_fullStr | High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure |
title_full_unstemmed | High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure |
title_short | High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure |
title_sort | high electromechanical coupling coefficient of longitudinally excited shear wave resonator based on optimized bragg structure |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673135/ https://www.ncbi.nlm.nih.gov/pubmed/38004943 http://dx.doi.org/10.3390/mi14112086 |
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