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High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure

In this work, a longitudinally excited shear-wave resonator (YBAR) based on single-crystalline lithium tantalate (LiTaO(3), LT) thin film is proposed. The YBAR has a 200 nm X-cut thin film and molybdenum electrode. A high effective electromechanical coupling coefficient (k(2)(eff)) of up to 19% for...

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Autores principales: Zhang, Zhiheng, Xuan, Weipeng, Jiang, Hong, Xie, Weilun, Li, Zhaoling, Dong, Shurong, Jin, Hao, Luo, Jikui
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673135/
https://www.ncbi.nlm.nih.gov/pubmed/38004943
http://dx.doi.org/10.3390/mi14112086
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author Zhang, Zhiheng
Xuan, Weipeng
Jiang, Hong
Xie, Weilun
Li, Zhaoling
Dong, Shurong
Jin, Hao
Luo, Jikui
author_facet Zhang, Zhiheng
Xuan, Weipeng
Jiang, Hong
Xie, Weilun
Li, Zhaoling
Dong, Shurong
Jin, Hao
Luo, Jikui
author_sort Zhang, Zhiheng
collection PubMed
description In this work, a longitudinally excited shear-wave resonator (YBAR) based on single-crystalline lithium tantalate (LiTaO(3), LT) thin film is proposed. The YBAR has a 200 nm X-cut thin film and molybdenum electrode. A high effective electromechanical coupling coefficient (k(2)(eff)) of up to 19% for the suspension-type structure was obtained. Furthermore, a Bragg reflector (SiO(2)/Pt) with optimized layer thickness ratio was employed to improve the performance of the YBAR. Compared to the acoustic wave resonators with the conventional quarter-wave ([Formula: see text] Bragg reflector, the proposed YBAR with an optimized Bragg reflector can reflect both the longitudinal and shear waves efficiently, and resonators with spurious-free response and high quality (Q) value were achieved. This work provides a potential solution to enabling high coupling micro-acoustic resonators with high Q factor in the 5G/6G communication system.
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spelling pubmed-106731352023-11-11 High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure Zhang, Zhiheng Xuan, Weipeng Jiang, Hong Xie, Weilun Li, Zhaoling Dong, Shurong Jin, Hao Luo, Jikui Micromachines (Basel) Article In this work, a longitudinally excited shear-wave resonator (YBAR) based on single-crystalline lithium tantalate (LiTaO(3), LT) thin film is proposed. The YBAR has a 200 nm X-cut thin film and molybdenum electrode. A high effective electromechanical coupling coefficient (k(2)(eff)) of up to 19% for the suspension-type structure was obtained. Furthermore, a Bragg reflector (SiO(2)/Pt) with optimized layer thickness ratio was employed to improve the performance of the YBAR. Compared to the acoustic wave resonators with the conventional quarter-wave ([Formula: see text] Bragg reflector, the proposed YBAR with an optimized Bragg reflector can reflect both the longitudinal and shear waves efficiently, and resonators with spurious-free response and high quality (Q) value were achieved. This work provides a potential solution to enabling high coupling micro-acoustic resonators with high Q factor in the 5G/6G communication system. MDPI 2023-11-11 /pmc/articles/PMC10673135/ /pubmed/38004943 http://dx.doi.org/10.3390/mi14112086 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Zhang, Zhiheng
Xuan, Weipeng
Jiang, Hong
Xie, Weilun
Li, Zhaoling
Dong, Shurong
Jin, Hao
Luo, Jikui
High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure
title High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure
title_full High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure
title_fullStr High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure
title_full_unstemmed High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure
title_short High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure
title_sort high electromechanical coupling coefficient of longitudinally excited shear wave resonator based on optimized bragg structure
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673135/
https://www.ncbi.nlm.nih.gov/pubmed/38004943
http://dx.doi.org/10.3390/mi14112086
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