Local Structural Modifications in Metallic Micropillars Induced by Plasma Focused Ion Beam Processing

A focused ion beam scanning electron microscope (FIB-SEM) is a powerful tool that is routinely used for scale imaging from the micro- to nanometer scales, micromachining, prototyping, and metrology. In spite of the significant capabilities of a FIB-SEM, there are inherent artefacts (e.g., structural...

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Detalles Bibliográficos
Autores principales: Singh, Kritika, Rout, Surya Snata, Krywka, Christina, Davydok, Anton
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673216/
https://www.ncbi.nlm.nih.gov/pubmed/38005149
http://dx.doi.org/10.3390/ma16227220

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673216/
https://www.ncbi.nlm.nih.gov/pubmed/38005149
http://dx.doi.org/10.3390/ma16227220

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