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Local Structural Modifications in Metallic Micropillars Induced by Plasma Focused Ion Beam Processing
A focused ion beam scanning electron microscope (FIB-SEM) is a powerful tool that is routinely used for scale imaging from the micro- to nanometer scales, micromachining, prototyping, and metrology. In spite of the significant capabilities of a FIB-SEM, there are inherent artefacts (e.g., structural...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673216/ https://www.ncbi.nlm.nih.gov/pubmed/38005149 http://dx.doi.org/10.3390/ma16227220 |