High-Bandwidth Repetitive Trajectory Tracking Control of Piezoelectric Actuators via Phase–Hysteresis Hybrid Compensation and Feedforward–Feedback Combined Control

Piezoelectric actuators (PEAs) are widely used in many nano-resolution manipulations. A PEA’s hysteresis becomes the main factor limiting its motion accuracy. The distinctive feature of a PEA’s hysteresis is the interdependence between the width of the hysteresis loop and the frequency or rate of th...

Descripción completa

Detalles Bibliográficos
Autores principales: Yuan, Jie, Wu, Haitao, Qin, Yanding, Han, Jianda
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673245/
https://www.ncbi.nlm.nih.gov/pubmed/38004866
http://dx.doi.org/10.3390/mi14112009

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673245/
https://www.ncbi.nlm.nih.gov/pubmed/38004866
http://dx.doi.org/10.3390/mi14112009

Ejemplares similares