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High-Bandwidth Repetitive Trajectory Tracking Control of Piezoelectric Actuators via Phase–Hysteresis Hybrid Compensation and Feedforward–Feedback Combined Control

Piezoelectric actuators (PEAs) are widely used in many nano-resolution manipulations. A PEA’s hysteresis becomes the main factor limiting its motion accuracy. The distinctive feature of a PEA’s hysteresis is the interdependence between the width of the hysteresis loop and the frequency or rate of th...

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Autores principales: Yuan, Jie, Wu, Haitao, Qin, Yanding, Han, Jianda
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673245/
https://www.ncbi.nlm.nih.gov/pubmed/38004866
http://dx.doi.org/10.3390/mi14112009
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author Yuan, Jie
Wu, Haitao
Qin, Yanding
Han, Jianda
author_facet Yuan, Jie
Wu, Haitao
Qin, Yanding
Han, Jianda
author_sort Yuan, Jie
collection PubMed
description Piezoelectric actuators (PEAs) are widely used in many nano-resolution manipulations. A PEA’s hysteresis becomes the main factor limiting its motion accuracy. The distinctive feature of a PEA’s hysteresis is the interdependence between the width of the hysteresis loop and the frequency or rate of the control voltage. Generally, the control voltage is first amplified using a voltage amplifier (VA) and then exerted on the PEA. In this VA-PEA module, the linear dynamics of the VA and the nonlinearities of the PEA are coupled. In this paper, it is found that the phase lag of the VA also contributes to the rate dependence of the VA-PEA module. If only the PEA’s hysteresis is considered, it will be difficult to achieve high-frequency modeling and control. Consequently, great difficulties arise in high-frequency hysteresis compensation and trajectory tracking, e.g., in the fast scanning of atomic force microscopes. In this paper, the VA-PEA module is modeled to be the series connection of a linear subsystem and a nonlinear subsystem. Subsequently, a feedforward phase–dynamics compensator is proposed to compensate for both the PEA’s hysteresis and the phase lag of the VA. Further, an unscented Kalman-filter-based proportional–integral–derivative controller is adopted as the feedback controller. Under this feedforward–feedback combined control scheme, high-bandwidth hysteresis compensation and trajectory tracking are achieved. The trajectory tracking results show that the closed-loop trajectory tracking bandwidth has been increased to the range of 0–1500 Hz, exhibiting excellent performance for fast scanning applications.
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spelling pubmed-106732452023-10-29 High-Bandwidth Repetitive Trajectory Tracking Control of Piezoelectric Actuators via Phase–Hysteresis Hybrid Compensation and Feedforward–Feedback Combined Control Yuan, Jie Wu, Haitao Qin, Yanding Han, Jianda Micromachines (Basel) Article Piezoelectric actuators (PEAs) are widely used in many nano-resolution manipulations. A PEA’s hysteresis becomes the main factor limiting its motion accuracy. The distinctive feature of a PEA’s hysteresis is the interdependence between the width of the hysteresis loop and the frequency or rate of the control voltage. Generally, the control voltage is first amplified using a voltage amplifier (VA) and then exerted on the PEA. In this VA-PEA module, the linear dynamics of the VA and the nonlinearities of the PEA are coupled. In this paper, it is found that the phase lag of the VA also contributes to the rate dependence of the VA-PEA module. If only the PEA’s hysteresis is considered, it will be difficult to achieve high-frequency modeling and control. Consequently, great difficulties arise in high-frequency hysteresis compensation and trajectory tracking, e.g., in the fast scanning of atomic force microscopes. In this paper, the VA-PEA module is modeled to be the series connection of a linear subsystem and a nonlinear subsystem. Subsequently, a feedforward phase–dynamics compensator is proposed to compensate for both the PEA’s hysteresis and the phase lag of the VA. Further, an unscented Kalman-filter-based proportional–integral–derivative controller is adopted as the feedback controller. Under this feedforward–feedback combined control scheme, high-bandwidth hysteresis compensation and trajectory tracking are achieved. The trajectory tracking results show that the closed-loop trajectory tracking bandwidth has been increased to the range of 0–1500 Hz, exhibiting excellent performance for fast scanning applications. MDPI 2023-10-29 /pmc/articles/PMC10673245/ /pubmed/38004866 http://dx.doi.org/10.3390/mi14112009 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Yuan, Jie
Wu, Haitao
Qin, Yanding
Han, Jianda
High-Bandwidth Repetitive Trajectory Tracking Control of Piezoelectric Actuators via Phase–Hysteresis Hybrid Compensation and Feedforward–Feedback Combined Control
title High-Bandwidth Repetitive Trajectory Tracking Control of Piezoelectric Actuators via Phase–Hysteresis Hybrid Compensation and Feedforward–Feedback Combined Control
title_full High-Bandwidth Repetitive Trajectory Tracking Control of Piezoelectric Actuators via Phase–Hysteresis Hybrid Compensation and Feedforward–Feedback Combined Control
title_fullStr High-Bandwidth Repetitive Trajectory Tracking Control of Piezoelectric Actuators via Phase–Hysteresis Hybrid Compensation and Feedforward–Feedback Combined Control
title_full_unstemmed High-Bandwidth Repetitive Trajectory Tracking Control of Piezoelectric Actuators via Phase–Hysteresis Hybrid Compensation and Feedforward–Feedback Combined Control
title_short High-Bandwidth Repetitive Trajectory Tracking Control of Piezoelectric Actuators via Phase–Hysteresis Hybrid Compensation and Feedforward–Feedback Combined Control
title_sort high-bandwidth repetitive trajectory tracking control of piezoelectric actuators via phase–hysteresis hybrid compensation and feedforward–feedback combined control
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673245/
https://www.ncbi.nlm.nih.gov/pubmed/38004866
http://dx.doi.org/10.3390/mi14112009
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