Cargando…
High-Bandwidth Repetitive Trajectory Tracking Control of Piezoelectric Actuators via Phase–Hysteresis Hybrid Compensation and Feedforward–Feedback Combined Control
Piezoelectric actuators (PEAs) are widely used in many nano-resolution manipulations. A PEA’s hysteresis becomes the main factor limiting its motion accuracy. The distinctive feature of a PEA’s hysteresis is the interdependence between the width of the hysteresis loop and the frequency or rate of th...
| Autores principales: | , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673245/ https://www.ncbi.nlm.nih.gov/pubmed/38004866 http://dx.doi.org/10.3390/mi14112009 |