Nano Hotplate Fabrication for Metal Oxide-Based Gas Sensors by Combining Electron Beam and Focused Ion Beam Lithography

Metal oxide semiconductor (MOS) gas sensors are widely used for gas detection. Typically, the hotplate element is the key component in MOS gas sensors which provide a proper and tunable operation temperature. However, the low power efficiency of the standard hotplates greatly limits the portable app...

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Detalles Bibliográficos
Autores principales: Feng, Zhifu, Giubertoni, Damiano, Cian, Alessandro, Valt, Matteo, Barozzi, Mario, Gaiardo, Andrea, Guidi, Vincenzo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673319/
https://www.ncbi.nlm.nih.gov/pubmed/38004917
http://dx.doi.org/10.3390/mi14112060

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673319/
https://www.ncbi.nlm.nih.gov/pubmed/38004917
http://dx.doi.org/10.3390/mi14112060

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