A motion characteristics modeled angular position sensor by nonlinear transfer of differential capacitance for miniaturized scanning mirrors

In this paper, an angular position sensor (APS) designed for a resonant miniaturized scanning mirror (M-SM) is presented. The APS operates based on the principle of differential variable capacitance, significantly expanding the detectable bandwidth from a few hertz to several kilohertz. By modeling...

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Detalles Bibliográficos
Autores principales: Liu, Songtao, Zhang, Gaofei, Zhang, Lingyun, Wang, Junya, Gong, Minghao, You, Zheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673869/
https://www.ncbi.nlm.nih.gov/pubmed/38025888
http://dx.doi.org/10.1038/s41378-023-00619-8

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10673869/
https://www.ncbi.nlm.nih.gov/pubmed/38025888
http://dx.doi.org/10.1038/s41378-023-00619-8

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