Design and Demonstration of a Microelectromechanical System Single-Ring Resonator with Inner Ring-Shaped Spring Supports for Inertial Sensors

This paper presents a novel single-ring resonator design and experimentally demonstrates its dynamic behavior. The proposed ring resonator design is simple and has a solid anchor at its center connected to an outside ring via inner ring-shaped springs. The mode shapes and frequency of the ring reson...

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Detalles Bibliográficos
Autores principales: Khan, Imran, Ranji, Ahmad Rahbar, Nagesh, Gnanesh, Ting, David S.-K., Ahamed, Mohammed Jalal
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10674206/
https://www.ncbi.nlm.nih.gov/pubmed/38005620
http://dx.doi.org/10.3390/s23229234

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10674206/
https://www.ncbi.nlm.nih.gov/pubmed/38005620
http://dx.doi.org/10.3390/s23229234

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